Abstract: Firstly, we analyzed several technologies by which to obtain DEM (digital elevation model), including the high resolution remote sensing stereo measurement, InSAR (interferometric synthetic aperture radar), LiDAR (light detection and ranging) and SfM (structure form motion), and their characteristics to extract VHR DEM (very high resolution digital elevation model). In practical application, we should consider the terrain features of the study area and choose reasonable technology to extract VHR DEM. Then, combining with the latest research results, we summarized the applications of VHR DEM in active faults identification and geometric structure analysis, co-seismic displacement and cumulative displacement as well as paleoearthquake research. VHR DEM has brought the active fault research into the unprecedented fine level with its sub-meter spatial resolution and high accuracy.